Metallic Processing Machinery

DC  Magnetron  Sputtering  Coater with Rotary  Stage and Water  Chiller

Zhengzhou CY Scientific Instrument Co., Ltd.
  • Type:Coating Spray Gun
  • Coating:Vacuum Coating
  • Substrate:Copper
  • Certification:CE, TUV
  • Condition:New
  • Specimen Chamber:Quartz Glass Tube

Base Info

  • Model NO.:VTC-16-SM
  • Distance:Adjustable
  • Control Panel:Touch Screen
  • Gas:Needle Valve
  • Name:DC Magnetron Sputtering Coater
  • Transport Package:Wooden Box
  • Specification:dia. 50mm
  • Trademark:CY
  • Origin:Zhengzhou, China
  • HS Code:8543709990
  • Production Capacity:210 Sets Per Month

Description

Basic Info.

Model NO. VTC-16-SM Distance Adjustable Control Panel Touch Screen Gas Needle Valve Name DC Magnetron Sputtering Coater Transport Package Wooden Box Specification dia. 50mm Trademark CY Origin Zhengzhou, China HS Code 8543709990 Production Capacity 210 Sets Per Month

Product Description

DC Magnetron Sputtering Coater machine w Rotary Stage & Water Chiller - VTC-16-SM
Introduction
VTC-16-SM is a High Power Desktop Magnetron Plasma Sputtering Coater with a water cold  2"  target head , water chiller and rotatable sample holder, which is designed for coating all metallic films, including Zn, Al, Ti light metallic film  at affordable cost. One Aluminium  target  is included 
for immediate use.  

Technical parameters

 
Input Voltage110/220VAC switchable
Output Power1600VDC  250W   150mA max.
Built-in over current (>150mA) protection
Specimen chamberQuartz glass tube, 167mm OD. x 152mm ID x 260mm Height
Sputtering Head 
&
Specimen stage
2" magnetron sputtering head with water cooling jacket  is included
One 50 mm Dia  stainless steel .sample stage is built in, which is 
rotatable from 0 - 5 RPM 
One manually operated shutter is build in to achieve better coating
Built in a fixture to place sputtering head when open chamber
Distance between sputtering head and sample stage is adjustable 
from 60 - 100 mm.

One Air Cold Recirculating Water Chiller  10L / min Flow is included for 
cooling sputtering head.
Control Panel6" color  touch-screen control panel for easy operation
One panel controls all parameters, including vacuum, current, target 
position and substrate heating temperature
Ultimate Vacuum 
Pressure
Built in KF25 vacuum port
The system requires a Ar gas tank with pressure regulator, which is
 not included

<10E-2 mbar by vane vacuum pump (not included)
7.5E-5 mbar by Turbo molecular pump (not included)
Gas AtmosphereOne needle valve installed to allow Ar gas inlet to achieve better
 plasma coating
TargetTarget size: 50 mm dia. x (0.1 - 3) mm,thickness

DC  Magnetron  Sputtering  Coater with Rotary  Stage and Water  Chiller
DC  Magnetron  Sputtering  Coater with Rotary  Stage and Water  Chiller
DC  Magnetron  Sputtering  Coater with Rotary  Stage and Water  Chiller
DC  Magnetron  Sputtering  Coater with Rotary  Stage and Water  Chiller