
DC  Magnetron  Sputtering  Coater with Rotary  Stage and Water  Chiller
Zhengzhou CY Scientific Instrument Co., Ltd.- Type:Coating Spray Gun
- Coating:Vacuum Coating
- Substrate:Copper
- Certification:CE, TUV
- Condition:New
- Specimen Chamber:Quartz Glass Tube
Base Info
- Model NO.:VTC-16-SM
- Distance:Adjustable
- Control Panel:Touch Screen
- Gas:Needle Valve
- Name:DC Magnetron Sputtering Coater
- Transport Package:Wooden Box
- Specification:dia. 50mm
- Trademark:CY
- Origin:Zhengzhou, China
- HS Code:8543709990
- Production Capacity:210 Sets Per Month
Description
Basic Info.
Model NO. VTC-16-SM Distance Adjustable Control Panel Touch Screen Gas Needle Valve Name DC Magnetron Sputtering Coater Transport Package Wooden Box Specification dia. 50mm Trademark CY Origin Zhengzhou, China HS Code 8543709990 Production Capacity 210 Sets Per MonthProduct Description
DC Magnetron Sputtering Coater machine w Rotary Stage & Water Chiller - VTC-16-SMIntroduction
VTC-16-SM is a High Power Desktop Magnetron Plasma Sputtering Coater with a water cold 2" target head , water chiller and rotatable sample holder, which is designed for coating all metallic films, including Zn, Al, Ti light metallic film at affordable cost. One Aluminium target is included
for immediate use.
Technical parameters
Input Voltage | 110/220VAC switchable |
Output Power | 1600VDC 250W 150mA max. Built-in over current (>150mA) protection |
Specimen chamber | Quartz glass tube, 167mm OD. x 152mm ID x 260mm Height |
Sputtering Head & Specimen stage | 2" magnetron sputtering head with water cooling jacket is included One 50 mm Dia stainless steel .sample stage is built in, which is rotatable from 0 - 5 RPM One manually operated shutter is build in to achieve better coating Built in a fixture to place sputtering head when open chamber Distance between sputtering head and sample stage is adjustable from 60 - 100 mm. One Air Cold Recirculating Water Chiller 10L / min Flow is included for cooling sputtering head. |
Control Panel | 6" color touch-screen control panel for easy operation One panel controls all parameters, including vacuum, current, target position and substrate heating temperature |
Ultimate Vacuum Pressure | Built in KF25 vacuum port The system requires a Ar gas tank with pressure regulator, which is not included <10E-2 mbar by vane vacuum pump (not included) 7.5E-5 mbar by Turbo molecular pump (not included) |
Gas Atmosphere | One needle valve installed to allow Ar gas inlet to achieve better plasma coating |
Target | Target size: 50 mm dia. x (0.1 - 3) mm,thickness |



