
Plasma Enhanced CVD Coating System for Deposition of Silicon Nitride, Amorphous Silicon and Microcrystalline Silicon Thin Films
Zhengzhou CY Scientific Instrument Co., Ltd.- Type:Coating Production Line
- Coating:Vacuum Coating
- Substrate:Steel
- Certification:CE
- Condition:New
- Vacuum Chamber:Stainless Steel
Base Info
- Front Stage Pump:Rotary Vane Pump Pumping Speed Is 1.1L,S
- Secondary Pump:Turbo Molecular Pump Pumping Speed 600L,S
- Limiting Vacuum:10-6PA
- Vacuum(Deposition):0.133~133PA,Adjusted According to The Process
- RF Power:13.56MHz,500W (Automatch)
- Flow Control:Mass Flowmeter(Default Ar,0~200sccm)
- Transport Package:Wooden Box Outside, Plastic Paper Inside
- Specification:Customized
- Trademark:CYKY
- Origin:Zhengzhou, China
- HS Code:8401409010
- Production Capacity:100 Sets,Month
Description
Type
CY-PECVD-450
Vacuum chamber
front opening door,φ300mm X 300mm,stainless steel
viewing window:φ100mm with baffle
Vacuum pump set
Front stage pump: rotary vane pump pumping speed is 1.1L/s
Secondary pump: Turbo molecular pump pumping speed 600L/s
Limiting vacuum
10-6Pa
10-4Pa(Within 30 minutes)
Vacuum(deposition)
0.133~133Pa,adjusted according to the process
RF power
13.56MHz,500W (automatch)
Flow control
mass flowmeter(default Ar,0~200sccm)
Dimensions
1100mm x 800mm x1100mm
Detail pictures of PECVD coater:







Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service