• Model NO.：ZF-2500
• Specification：L5000*W4500*H3000 mm
• Trademark：ASYY
• Origin：China

Equipment specification

PVD/ZF-2500 type resistance evaporation vacuum coating machine

Item

Configuration and requirements

Vacuum chamber

Dimension of internal

Length 2500*width 600*height 1600mm        

 (According to the final design size)

Material

 Vacuum chamber use 304 stainless steel;

 Internal wall mechanical polishing, external surface spray paint treatment;

Structural type

 Vertical, box structural

 The external strength of the cavity is strengthened by strengthening the cavity.

 One end of the chamber opens the door and the suction port is on the side of the chamber.

 The bottom of the cavity has a work-piece frame walking track.

Observation window

 There is one observation windows on the chamber door, which can observe the indoor work.

Interior lining panel

The interior chamber equipped with stainless inner lining, easy to unload;

  Equipped with two interior lining panel;

Cavity base

 Use Q235 material manufacture,surface painting;

Ion source

  In the cavity to install a set of ion source, before the use of high-energy ion plating on the work-piece surface bombardment cleaning, improve the film adhesion;

 Equipped with one set high voltage DC supply (5000V/20KVA)

Air exhaust

Pure pumping

 Use 2 stands KT-630 type diffusion pump                  

 Pumping speed:18000L/S   Power:11KW/stand

 Equipped with two sets water cooling system

Booster pump

 Use 1 stand ZJP-1200 type Roots pump          

 Pumping speed:1200L/S     Power:11KW   

Mechanical pump

 Use 1 stand HL-150 type slide valve pump                 

 Pumping speed:150m3/h   Power:11KW

Holding pump

Use 1 stand 2X-30 type rotary vane pump            

 Pumping speed:30m3/h    Power:3KW

Vacuum network

 Equipped with one KT-630 type pure pumping valve 

 Equipped with one DF-200 type beginning pump valve,one DF-200 type front valve.

 With a pump to maintain a solenoid valve, cavity inflatable valve 2, 1 set of pipeline inflatable valve

 Vacuum valve all use pneumatic baffle valves, aluminum alloy cylinder;

 Vacuum pipe 1 set, stainless steel production and processing, surface painting;

Work-piece car

 Work-piece frame with 2 sets, the use of stainless steel production;

 Work-piece frame loading size: length 1900mm high 1300mm

Evaporation system

Each work-piece rack to install multiple sets of evaporation tungsten wire, the staff in the cavity outside the addition of aluminum wire;

 Evaporation electrode using copper material production;

The vacuum chamber is fitted with a set of collision electrodes connected with the evaporation electrodes on the workpiece frame;

With evaporation transformer 1 (14V / 40KVA)

The use of power control mode, can be set to set the evaporation power and time;

Vacuum measuring system

 Digital composite vacuum gauge   one set            

 High vacuum measurement 1 way, low vacuum measurement 2 way

Cooling system

 Equipped with one set water separator.

 Inlet and outlet the water pipe divided into two kinds of color distinction, alignment specification, neat, beautiful

Vacuum seal

 Equipped with special vacuum temperature resistance, pressure seals.

Electric control

  Mitsubishi PLC control, 12-inch color touch screen, can also be fully automatic control equipment;

The main components of the brand products;

 Use over-current, overload, overheating protection, while equipment with water, gas alarm and other protection

 Valve self-locking, interlock

Using a standard electronic control cabinet 1

Vacuum parameter

Pumping speed

 New machine,no-load,clean,cold state from atmosphere to 3×10-2Pa 10 min.

Ultimate vacuum

 New machine,no-load,clean,cold state 8×10-4 Pa

Pressure rising rate

New machine, no load, clean, cold state pumping more than 5 hours off the valve 0.8Pa / 20min

Production takt

About 15min/furnace  (not include loading time)

Total power

Installed power:107KW     

Actual power consumption:about 40KW/h

Total water consumption

 Recirculating water,flow about:6m3/h

Dimension

 L5000*W4500*H3000 mm

Total weight

About 6000 kg

Product picture