• Model NO.：PVD-18-01
• Transport Package：Wooden Box Shockproof
• Specification：500-900kg
• Trademark：PEROVS
• Origin：Hangzhou
• Production Capacity：60 Sets,Year

Basic Info.

Model NO. PVD-18-01 Transport Package Wooden Box Shockproof Specification 500-900kg Trademark PEROVS Origin Hangzhou Production Capacity 60 Sets/Year

Product Description

100×100mm Magnetron sputtering System

High vacuum magnetron sputtering coating machine using vacuum magnetron sputtering technology, it can be used in a high vacuum background, filled with high-purity argon gas, using magnetron sputtering to prepare a variety of metal films, dielectric films, semiconductor films, but also better sputtering ferromagnetic materials (Fe, Co, Ni), the preparation of magnetic films. Under the coating process conditions, the microcomputer-controlled sample turntable and target baffle can prepare both single-layer films and various multilayer films, which provides a very ideal development means for the field of new materials and thin film science research.

 

Parameter	Specification	Description
Model	PVD-18-01	Customizable
Inner cavity size	450mm	water cooling,customizable
Processing area	Diameter100mm	customizable
Ultimate vacuum	3×10-5Pa	customizable
RF power supply	600W
Film thickness meter	MDC-360C/310C	±1 Å
Equipment power	5000W	AC220V/50Hz
Weight/Packaging	500-900kg,Wooden box shockproof

 Standard with 100mm diameter permanent magnet target.
Small size and compact structure can save the floor space of the supplied R&D unit.
Can be used for multiple purposes and can be switched with vapor deposition machine.


It can be applied to the preparation of thin films for various products, especially for the preparation of thin films for large-area solar cells. It has a large area film preparation, great solvent saving, and a benchtop compact structure designed for scientific research.